JPH01142457U - - Google Patents

Info

Publication number
JPH01142457U
JPH01142457U JP3816988U JP3816988U JPH01142457U JP H01142457 U JPH01142457 U JP H01142457U JP 3816988 U JP3816988 U JP 3816988U JP 3816988 U JP3816988 U JP 3816988U JP H01142457 U JPH01142457 U JP H01142457U
Authority
JP
Japan
Prior art keywords
exhaust gas
furnace
adsorber
vacuum
furnace body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3816988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3816988U priority Critical patent/JPH01142457U/ja
Publication of JPH01142457U publication Critical patent/JPH01142457U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
JP3816988U 1988-03-23 1988-03-23 Pending JPH01142457U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3816988U JPH01142457U (en]) 1988-03-23 1988-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3816988U JPH01142457U (en]) 1988-03-23 1988-03-23

Publications (1)

Publication Number Publication Date
JPH01142457U true JPH01142457U (en]) 1989-09-29

Family

ID=31264733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3816988U Pending JPH01142457U (en]) 1988-03-23 1988-03-23

Country Status (1)

Country Link
JP (1) JPH01142457U (en])

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5964516A (ja) * 1982-10-01 1984-04-12 Fuji Electric Corp Res & Dev Ltd アモルフアスシリコン膜生成方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5964516A (ja) * 1982-10-01 1984-04-12 Fuji Electric Corp Res & Dev Ltd アモルフアスシリコン膜生成方法

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